Abstract
We have proposed and demonstrated a superconducting tunnel junction (STJ) with an embedded coil for applying a magnetic field. The STJ was fabricated on the coil, which was embedded in a Si substrate. The coil in the Si substrate consists of superconducting microstrip lines and applies a magnetic field to the STJ to suppress the dc Josephson current. The embedded coil was designed with a line and space of 3µm and a thickness of 120nm. To planarize the coil, we employed chemical mechanical polishing (CMP) in our fabrication process. In this STJ, the maximum current of the embedded coil was 28mA, which corresponded to the maximum magnetic field of 11.76mT.
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