Abstract
The microstructural and superconducting properties of Nb3Sn films fabricated by co-sputtering on Nb and sapphire substrates are described. The crystallinity and superconducting properties of the films depended on the substrate temperature during the deposition, and the highest Tc of 15.00 K was observed on the film deposited at 500 °C. The film deposited at room temperature and then annealed at 665 °C for 3 h had a Tc of 15.88 K, whereas annealing the film at 950 °C for 3 h resulted in a Tc of 17.61 K. The film morphology also changed after annealing at 950 °C from randomly-oriented elongated grains to well-packed grains with a root-mean-square surface roughness of ∼14 nm. These Nb3Sn film properties make co-sputtering Nb and Sn at room temperature followed by annealing attractive for superconducting radio-frequency applications.
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