Abstract
Particle-agglomerated films exhibit rough surfaces, which can be suitable for realization of ultra hydrophobicity. We fabricated particles and their deposits of silica with organic functional groups (SiO:CH) by plasma polymerization of organosilicon reactants including methyl and vinyl functional groups. The trimethyl(vinyl)silane reactant showed a uniform deposition of the plasma-polymerized SiO:CH particles in a large area, while the trimethyl (vinyloxy)silane exhibited a localized particle deposition.
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