Abstract

Silicone periodic micro-suction cup structures approximately 1 μm in diameter and 2 μm in height and at regular intervals of 2.5 μm were directly fabricated by ArF excimer laser. The laser was focused on Al-coated silicone by silica microspheres, each of diameter 2.5 μm, which covered the entire surface. The silicone underneath each microsphere photochemically swelled, after laser-ablating the Al to limit the diameter of the swelling. The Al also enabled the adjusting of the focal point to the surface of the silicone to form a hole approximately 0.5 μm in diameter centered at each swelled silicone structure. The fabricated silicone micro-suction cup structures showed superhydrophobicity.

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