Fabrication of silicon based microfluidics device for cell sorting application

Abstract

In this paper we report on a novel silicon fabrication process of a microfluidics device used for cell sorting application. The process uses wafer level fabrication technique that allows for a small form factor device in combination with a new photopatternable polymer with excellent properties for microfluidics on silicon. The ability to process on wafer level distinguish this from other processes, whose yields are limited to few test samples. The device fabrication includes: processing of micro-heaters, definition of polymer microfluidic channels and collective die-to-wafer bonding of glass substrate onto the polymer channels. The paper will focus on the development of a wafer scale process flow and initial characterization of the available devices.