Abstract
Moth-eye structures composed of an ordered array of tapered SiO2 pillars were fabricated by photo-nanoimprinting using anodic porous alumina as a mold. The formation of SiO2 moth-eye structures was carried out using a photosensitive polysilane solution as a precursor of silica. The SiO2 moth-eye structures formed on the surface of a glass plate effectively suppressed the reflection of incident light.
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