Abstract
Two silicon carbide (SiC) lightweight off-axis aspheric mirrors were fabricated by using robot polishing technology. One is a primary mirror with dimension 380mm×328mm, the other is a tertiary mirror with dimension 294mm×238mm. The robot polishing technology is the combination of CCOS technology and a 6-axises industrial robot. The setup of robot polishing system is discussed, and the mirror aspheric grinding, surface polishing and figuring process are reported in this paper. The final surface shape error of primary mirror is 11.4nm RMS, and the tertiary is 12.1nm RMS. The capability of off-axis aspheric mirror fabricating on robot polishing system is verified.
Highlights
silicon carbide (SiC) has excellent material property such as high thermal and mechanical stability, which is suitable for optical application in aerospace and generation lithography
The Computer Controlled Optical Surfacing (CCOS) technology has long been recognized as a suitable way to grinding and polishing aspheric surface [2, 3]
We introduce the setup of the robot polishing system, and present the process of SiC mirror aspheric grinding and polishing
Summary
SiC has excellent material property such as high thermal and mechanical stability, which is suitable for optical application in aerospace and generation lithography. Off-axis aspheric mirrors is widely used in many optical systems [1]. For SiC off-axis aspheric mirrors, the fabricating quality, efficiency and costs are three main problems. The Computer Controlled Optical Surfacing (CCOS) technology has long been recognized as a suitable way to grinding and polishing aspheric surface [2, 3]. We introduce the setup of the robot polishing system, and present the process of SiC mirror aspheric grinding and polishing. In order to make the robot suitable CCOS fabrication, we developed a software in VAL3 language which runs on the robot controller in order to interpret the G-code like polishing path file to the robot moving code.
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