Fabrication of scanning thermal microscope probe with ultra-thin oxide tip and demonstration of its enhanced performance

Abstract

With the vigorous development of new nanodevices and nanomaterials, improvements in the quantitation and resolution of the measurement of nanoscale energy transport/conversion phenomena have become increasingly important. Although several new advanced methods for scanning thermal microscopy (SThM) have been developed to meet these needs, such methods require a drastic enhancement of SThM probe performance. In this study, by taking advantage of the characteristics of micromechanical structures where their mechanical stability is maintained even when the film that composes the structures becomes extremely thin, we develop a new design of SThM probe whose tip is made of ultra-thin SiO2 film (~100nm), fabricate the SThM probes, and demonstrate experimentally that the tip radius, thermal time constant, and thermal sensitivity of the probe are all improved. We expect the development of new high-performance SThM probes, along with the advanced measurement methods, to allow the measurement of temperature and thermal properties with higher spatial resolution and quantitative accuracy, ultimately making essential contributions to diverse areas of science and engineering related to the nanoscale energy transport/conversion phenomena.