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Abstract

Microstructures of heteroepitaxial diamond films grown on Pt (111) were examined by transmission electron microscopy (TEM). Our results show that the film consists of highly (111)-oriented diamond particles including subgrains with azimuthal rotation within ∼ 10. The internal defects such as stacking faults, microtwins and dislocations are unevenly distributed within a grain. Electron diffraction patterns taken in both plan-view and cross-sectional view show that the epitaxial relationship at some local interface areas between the diamond and Pt is indeed diamond (111)//Pt (111) and diamond 〈110〉//Pt 〈110〉. However, the interface is very rough, as wide as ∼ 700 nm in depth, including a graphite layer of ∼ 300 nm thick and small Pt fragments. Based on the observed structures, the origins of the defects, epitaxial alignment of the diamond crystals, and nucleation site are discussed.