Fabrication of Quasi-Vertical GaN-On-SiC Trench MOSFETs

Abstract

We demonstrate quasi-vertical GaN MOSFETs fabricated on SiC substrates. The GaN epitaxial layers were grown via MOCVD on 100 mm 4H-SiC wafers, with the device structure consisting of a 2.5 μm drift layer and a Mg doped p-GaN body. The fabricated transistors exhibit normally-off characteristics, with low off-state leakage behavior and an on/off ratio of over . The specific on-resistance was measured to be which compares favorably to devices fabricated on other foreign substrates. Our results demonstrate an alternative substrate for realizing vertical GaN devices, which potentially offers better material quality and thermal properties compared with other foreign substrate choices.