Fabrication of quasi-one-dimensional oxide nanoconstriction array via nanosphere lithography: A simple approach to nanopatterns of multicomponent oxides

Abstract

A simple but effective approach is demonstrated for the fabrication of an array of La0.67Sr0.33MnO3−δ nanoconstriction via nanosphere lithography. Such nanoconstrictions can be treated as quasi-one-dimensional conductors. A monolayer of hexagonally arranged SiO2 microspheres, whose dimension was reduced by reactive ion etching, is employed as a mask for pulsed laser deposition. Nanoconstriction array of around 100nm could be obtained. Conventional photolithography and the lift-off technique were employed to shape the nanoconstriction array into the bridge geometry for transport property measurements. The results showed that the nanoconstriction array exhibited nonlinear transport properties different from those exhibited by continuous film. This approach opens the possibility of fabricating and studying nanopatterned multicomponent oxides which include magnetoresistive manganites, superconducting cuprates, and other perovskite oxides.