Abstract

We studied about a method of fabricating quartz cantilevers with a conductive tip. The quartz cantilever is a key part for small-amplitude dynamic force microscopy combined with an optical deflection sensor. The stiffness of cantilevers enables us a stable small-amplitude operation, because a sufficiently high oscillation energy, which is based on a high spring constant value prevents the cantilever from contacting the sample. We performed topographic imaging with atomic resolution and site-specific force distance curve measurement using a quartz cantilever at room temperature.

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