Abstract
The articles thus far in this MRS Bulletin issue on Emerging Methods for Micro- and Nanofabrication have addressed the creation of structures or devices on a small scale. What is implicit in some of these articles is that a substrate of sufficient flatness is available upon which to build these structures in a controlled way. A related area, therefore, is the formation of these flat surfaces, as well as the development of the tools to make them.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
