Abstract
Two-phase nanocomposite layers based on porous silicon and nonstoichiometric tin oxide were fabricated by various methods. The structure, as well as elemental and phase composition, of the obtained nanocomposites were studied using transmission and scanning electron microscopy, Raman spectroscopy, Auger electron spectroscopy, and X-ray photoelectron spectroscopy. The results obtained confirm the formation of nanocomposite layers with a thickness as large as 2 μm thick and SnOx stoichiometry coefficients x = 1.0–2.0. Significant tin diffusion into the porous silicon matrix with Deff ≈ 10−14 cm2 s−1 was observed upon annealing at 770 K. Test sensor structures based on por-Si/SnOx nanocomposite layers grown by magnetron deposition showed fairly high stability of properties and sensitivity to NO2.
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