Abstract
In the present study, polymer micro/nano-hybrid lens array is fabricated by hot embossing process using a microstructured anodic aluminum oxide (AAO) mold. For a mass replication of functional microoptical elements such as antireflective microlens array, a novel fabrication method of a multiscale mold is proposed and demonstrated. The fabrication method consists of two consecutive steps – an indentation of an electropolished aluminum substrate for microstructures and an electrochemical oxidation process for nanostructures on top of the microstructures. By using the present fabrication method, the microstructured AAO mold is successfully realized and utilized in hot embossing process. In this manner, the PMMA microlens array covered with the close-packed nanolens array is fabricated.
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