Abstract
About 60 years ago, the biological cell counter with an electrical detection technique was invented by Dr. Coulter. The solid state nanopores can be fabricated by using various techniques such as ion sculpting, high energy electron beams such as such as field emission scanning microscopy (FESEM) and transmission electron microscopy (TEM). However, this fabricated portable nanopore device is reported to have too high error rates. The high error rates may be attributed to the electrical double layer formed in the nanopore channel. Considering the fact that most biosensors are utilizing the optical detection technique, the optical pore device can be an excellent candidate for the next generation single molecule sensor. we have also fabricated the nanopore with its diameter ranging from 10 to 3 nm inside the FIB drilled aperture by using various surface treatments including electron beam irradiations and ion beam irradiation. In this report, we will address the fabrication of the optical pores with double slits. We observed the nanoscale Young’s interference from the double slits dependent upon the pitch. With increasing the pitch size, the periodic interference phenomena are observed and the optical intensity through the nanoscale slits are also periodically increasing We also fabricated the (7 x 7) hole array with its diameter of ~ 200 nm dependent upon the pitch between the holes with and without the nano- scale double slits. The highest enhancement of 1.72 at the peak is observed at 530 nm pitch without slits, and enhancement of 8.36 at the peak is also observed from the (7 x 7) hole array with a 530 nm pitch with nanoscale double slits. The enhancement of ~ 4-fold increase at the peak can be attributed to the constructive interference between two surface plasmon waves from hole and slits. This device can be utilized as optical manipulation and characterization for nanobio sensor, especially for single molecule analysis Figure 1
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