Abstract

AbstractReceiver optoelectronic integrated circuits (OEICs) have been successfully designed on a three‐inch diameter InP substrate. Epitaxial layers grown by OMVPE on three‐inch diameter InP substrates showed good uniformity of electrical and optical properties. By using the epitaxial layers, transimpedance‐type receiver OEICs were fabricated. the receiver OEICs over a three‐inch diameter InP substrate showed an average bandwidth of 2.78 GHz with a standard deviation of 280 MHz. the receiver also exhibited a transimpedance of 61.1 dB and a sensitivity of ‐24.9 dBm for 2.4 Gb/s input signals. These results indicate that the receiver OEICs designed on a three‐inch diameter InP substrate are ready for practical use in Gb/s lightwave systems.

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