Fabrication of Patterned Inverse Opal Structure Through Physical Confinement Assembly and Selective Electrochemical Deposition

Abstract

We develop a chemical modification‐free process for fabrication of patterned photonic crystals (PhCs) of inverse opal structure. This process, involving photolithography, colloidal assembly, and electrochemical deposition, is potentially applicable for fabrication of practical optical devices. Polystyrene (PS) spheres were self‐assembled onto pre‐patterned substrates to serve as the sacrificial template. This template was then converted into a patterned inverse opal structure with selective electrochemical deposition. The thickness of the inverse opal structure can be easily controlled by adjusting the time of electrodeposition. We demonstrated the process with fabrication of a T‐shape structure surrounded by an inverse opal structure of titania. Titania was chosen here as a representative demonstration material, and the process can be readily applied to other materials of desired characteristics.