Fabrication of ordered arrays of micro- and nanoscale features with control over their shape and size via templated solid-state dewetting.

Jongpil Ye

doi:10.1038/srep09823

Abstract

Templated solid-state dewetting of single-crystal films has been shown to be used to produce regular patterns of various shapes. However, the materials for which this patterning method is applicable, and the size range of the patterns produced are still limited. Here, it is shown that ordered arrays of micro- and nanoscale features can be produced with control over their shape and size via solid-state dewetting of patches patterned from single-crystal palladium and nickel films of different thicknesses and orientations. The shape and size characteristics of the patterns are found to be widely controllable with varying the shape, width, thickness, and orientation of the initial patches. The morphological evolution of the patches is also dependent on the film material, with different dewetting behaviors observed in palladium and nickel films. The mechanisms underlying the pattern formation are explained in terms of the influence on Rayleigh-like instability of the patch geometry and the surface energy anisotropy of the film material. This mechanistic understanding of pattern formation can be used to design patches for the precise fabrication of micro- and nanoscale structures with the desired shapes and feature sizes.

Highlights

Array commensurate with it[10]
Thompson and I have recently demonstrated that the dewetting of patches patterned from 120 nm-thick single-crystal nickel films leads to the controllable formation of various regular patterns with smaller feature sizes and increased complexity
The different dewetting behaviors of the palladium and nickel films are explained in terms of the surface energy anisotropies of the two materials, suggesting that templated-dewetting of single-crystal films can be used to pattern a wide range of materials of known surface energy anisotropy

Summary

Introduction

Array commensurate with it[10]. In the case of single-crystal films, they are crystallographically confined to evolve during dewetting into specific morphologies that are compatible with the symmetries of their surfaces. Thompson and I have recently demonstrated that the dewetting of patches patterned from 120 nm-thick single-crystal nickel films leads to the controllable formation of various regular patterns with smaller feature sizes and increased complexity. The previous study did not address the questions of a potential influence of the film material and thickness on the shape and size characteristics of dewetted patterns. These are important questions to be addressed prior to the generalization of this patterning method to a wider range of materials and scales. I report dewetting results of patches patterned from single-crystal palladium and nickel films of different orientations and thicknesses. The different dewetting behaviors of the palladium and nickel films are explained in terms of the surface energy anisotropies of the two materials, suggesting that templated-dewetting of single-crystal films can be used to pattern a wide range of materials of known surface energy anisotropy

Methods

Results

Conclusion