Fabrication of Ordered Anodic Nanoporous Alumina Layers and their Application to Nanotechnology

Abstract

This chapter contains sections titled: Introduction Self-ordered Anodic Porous Alumina Introduction Controlling Factor of Self-ordering of Pore Arrangement in Anodic Porous Alumina Typical Current–Time Transients at Constant Voltages Change in the Porosity of Anodic Alumina with Increasing Formation Voltage Typical Self-ordering Behavior High-current-density/High-electric-field Anodization New Self-ordering Conditions Ideally Ordered Anodic Porous Alumina Two-step Anodization Fabrication of Ideally Ordered Anodic Porous Alumina Square Cell Arrangement Detailed Observation of Square Cells Anodic Porous Alumina with 3D Periodicity Modulation of Channel Structure 2D/3D Composite Porous Alumina Application of Nanoporous Alumina to a Mask for Fabrication of Nanostructures Nanopatterning: Conventional Lithography vs. Natural Lithography Anodization of Al on a Si Substrate Natural Lithography of Si Surfaces Using Anodic Porous Alumina as a Mask Summary Acknowledgments References