Abstract

By using nan oparticles of gold and silver, we succeeded in fabricating nanoscale heterojunctions of Si/Au and Si/Ag on the surface of Si substrates. Formation kinetics are discussed on the basis of a structural and an elemental analysis using a transmission electron microscope (TEM) and energy-dispersive X-ray spectroscopy (EDX). This process is called “surface droplet epitaxy (SDE)”. Additionally, the characteristic structure of nanoscale heterojunction, i.e., the epitaxial relation between metal particles and the Si dot with large expansion of the lattice constant of metal particles, is attributed to a size effect of nanoscale materials.

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