Abstract
Self-ordered nanoporous α-alumina membrane having uniformly sized straight pore arrays was fabricated by anodization of aluminum and subsequent through-hole and heat treatment. The detachment of thick anodic oxide film formed in oxalic acid was performed by combining preliminary loaded heating before stepwise voltage drop and cathodic polarization in phosphoric acid to prevent excess dissolution at the through-hole process. Suppression of excess dissolution of the upper layer of anodic alumina membrane acted an important role to provide symmetrical evenness of top and bottom pore density for the prevention of deformation such as warp and cracking during subsequent heating for crystallization. Thus, a thick, robust and chemically resistant nanoporous crystalline α-alumina membrane was successfully obtained by optimizing preparation conditions.
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