Abstract
In recent years, solid-state nanopores have been widely used in biotechnology for detecting single molecules. Here, we studied the influence of membrane thickness and Focused Ion Beam action time on the diameter of silicon nitride nanppores. The results showed that on the 300 nm thick silicon nitride membrane, the minimum pore was 170 nm in diameter; while on thinner membranes with the thicknesses of 200nm and 100nm, the minimum pore diameters were 100nm and 30nm respectively. And on the membrane of a given thickness, the minimum diameter of nanopore is determined by the minimum action time. Therefore the 100 nm membrane thickness is ideal for milling small nanopores.
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