Fabrication of nanometer-scale mechanical devices incorporating individual multiwalled carbon nanotubes as torsional springs

Abstract

We report on the fabrication of nanometer-scale mechanical devices incorporating multiwalled carbon nanotubes (MWNTs) as the torsional spring elements. We have employed electron beam lithography to pattern device elements directly onto individual MWNTs on a silicon dioxide substrate. The structures were suspended by etching the substrate and subsequent critical-point drying of the sample. We also briefly present characterization of the torsional properties of an individual MWNT. The techniques described are applicable to other nanometer-scale rod-like objects.