Abstract
This letter presents a novel atomic force microscopy (AFM)-based nanomanufacturing method combining the tip scanning with the high-precision stage movement to fabricate nanochannels with ladder nanostructure at the bottom by continuous scanning with a fixed scan size. Different structures can be obtained according to the matching relation of the tip feeding velocity and the precision stage moving velocity. This relationship was first studied in detail to achieve nanochannels with different ladder nanostructures at the bottom. Machining experiments were then performed to fabricate nanochannels on an aluminum alloy surface to demonstrate the capability of this AFM-based fabrication method presented in this study. Results show that the feed value and the tip orientation in the removing action play important roles in this method which has a significant effect on the machined surfaces. Finally, the capacity of this method to fabricate a large-scale nanochannel was also demonstrated. This method has the potential to advance the existing AFM tip-based nanomanufacturing technique of the formation these complex structures by increasing the removal speed, simplifying the processing procedure and achieving the large-scale nanofabrication.
Highlights
Nowadays, the rapid development of microfluidic/nanofluidic systems has been seen in many applications such as fluid mixing [1,2], drug delivery [3], ion transporters [4], and DNA translocators [5]
The edge of the atomic force microscopy (AFM) tip plays a main role in the scratching test, machining with such small feed leads to a small attack angle resulting in plowing machining state, no obvious trace of the cutting tool left at the bottom of the channel and a relatively rough surface, which agrees well with previous study [18]
From the scanning electron microscopy (SEM) image, lots of larger burrs remained on both sides of the trace of the AFM tip
Summary
The rapid development of microfluidic/nanofluidic systems has been seen in many applications such as fluid mixing [1,2], drug delivery [3], ion transporters [4], and DNA translocators [5]. The micro/nanochannels are the key components in the microfluidic/nanofluidic systems. More complex nanochannels (e.g., with some nanostructures at the bottom) are designed to study the influences on the flowing characteristic of fluid in the nano/microchannels [2]. The successful fabrication of these micro/nanochannels urgently needs to be solved. The nanochannel fabrication methods mainly include focused ion beam milling [5], nanoimprint lithography [6], electron beam drilling [7], and wet chemical etching [8]. The complexity and/or cost of these methods greatly restrict the nanochannel fabrication, especially for the nanochannel with complex nanostructures at the bottom
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