Abstract
Both focused electron and ion beams (FEB and FIB) were used for fabricating patterned nano-/micro-structures on the surfaces of an iron phosphate glass (FePO). Periodically arranged, nano-sized holes/tubes/rings with their walls being made of Fe nanoparticles were fabricated by FEB direct writing. The diameters of the holes/tubes can be controlled by the beam size and dwell time, as well as by subsequent electron irradiation. Micro- and nano-sized patterns, also with Fe-nanoparticles sitting on the surfaces, were fabricated by FIB sputtering. These result in the possible exploitation of new applications of the glass, particularly in biomaterials, optical circuits, high-density data storage, and controlling the growth of some nanowires/tubes.
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