Abstract
To realize a multi-channel integrated filter on a single substrate, a new preparation method is proposed in this paper, which was to adjust the thickness of the space layer based on the Fabry–Pérot interferometer theory. Optical thickness adjustment is achieved by integrating multispectral channels on a single substrate that is fabricated combined with coating, nanoimprinting, and single point diamond turning. A multi-channel filter is integrated on a mold and machined once, and three kinds of multi-channel array filter molds are fabricated utilizing fast tool servo turning. The accuracy of each channel is analyzed for the machine accuracy of the mold, which affords the key to this method. Although there exists a slight oscillation error on the surface of each channel, the maximum error is less than 4 nm and the ratio of error and differentials designed is less than 7%. The results indicate that the processing method of the multi-channel filter mold is feasible. As far as this technology is concerned, it provides technical support for mass manufacturing of large-scale multi-channel array filters.
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