Abstract
This study aims to expand the possibility of nanoimprint lithography by fabricating a high-accuracy gold (Au) nanostructure, which holds great potential in broad functional applications, using solvent-permeable porous cross-linking molds derived from hydroxypropyl-cyclodextrin. Multiple functional Au moth-eye nanostructures were imprinted 30 times using Au nanopaste, which involved volatile dilution solvents in the adjusted nanoimprint processes. The proposed method using solvent-permeable porous cross-link molds having high oxygen transmission rate could avoid the nanopattern failure due to the trapping of solvent and/or gas in the solvent-impermeable molds.
Published Version
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