Abstract
We report on UV embossing process for realizing an optical power splitter using a UV curable polymer material. The polydimethylsiloxane (PDMS) mold transferred from the master was used for forming the micro-scale structure and patterning repeatedly it. We experimented also on the durability of the PDMS mold in casting a UV curable polymer. Residual layer thickness on the replica was observed to be below 0.5 μm.
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