Fabrication of Microstructured Surfaces by Five-Axis Ultra Precision Machine Tool

Abstract

In this paper, a five-axis ultra precision machine tool for fabrication of microstructured surfaces is presented. This machine consists of two rotary axes (C&B) and three linear axes (X&Y&Z). High precision aerostatic bearing and torque motor are adopted in C axis (main spindle) and B axis. X axis and Z axis use the hydrostatic guideway and are driven by linear motors. Y axis is driven by torque motor and precision ball screw. This machine is able to realize multiple processing methods, including ultra precision diamond turning, ultra precision milling, fly-cutting, fast tool servo and slow tool servo diamond turning.Furthermore, a large number of experiment researches are carried out. Some typical microstructure surfaces are manufactured, for sinusoidal grid surface, the surface roughness Ra is 11.9nm, which is machined by slow tool servo diamond turning. Micro pyramid array surface is fabricated by using fly-cutting, which performs well both in the profile accuracy and the repeatability. These experiment researches prove that this ultra precision machine is superior in accuracy and system reliability.