Abstract
This paper presents an experimental investigation into microfabrication of nickel template by femtosecond laser in air at atmospheric pressure. The laser pulses used for the study are 800 nm in wavelength, 100fs in pulse duration, and the repetition rate used is 1KHz. Micro-hole ablation experiments are carried out in air by focusing the femtosecond laser beam on the nickel target surface at normal incidence with the long-focus objective lens of enlargement factor 50 and NA=0.7. Dependence of the diameter, depth and depth-to-diameter ratio of the fabricated holes on the laser power and number of pulses are revealed experimentally. Microgrooves with good uniformity are fabricated on nickel template with femtosecond laser by optimizing the process parameters.
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