Fabrication of micropyramid structure by fly-cutting

Abstract

Microgroove cutting by fly-cutting is studied to obtain the optimized parameters to get a smooth groove with less burr and chip. We analyzed the reason for the second groove and reduced the cutting times to fade the effect of machine reposition error. Introducing additional empty cut further reduced the burr and chip. To get the ideal micropyramid arrays, all factors must be considered and controlled. Finally, processed pyramid arrays with the depth of 1 mu m whose structure distributed the entire surface evenly and with no obvious chip. (C) 2019 Society of Photo-Optical Instrumentation Engineers (SPIE)