Abstract
This paper presents an effective and flexible process to fabricate microlenses based on the overplating phenomenon in electroforming of microvias. With the overplating structures working as the master mold, the polymeric microlenses are replicated through a combination of PDMS molding and UV curing. Shape evolution of the overplating structures in electroforming leads to the formation of spherical surfaces and enables the fabrication of hemispherical lenses with various sizes and curvatures. Furthermore, through design of the pitch in the microvia array and control of the deposition time in electroforming, microlens arrays with packing ratios up to 100% can be obtained. Results of geometrical and optical measurements demonstrate the potential of this method in the fabrication of microlenses.
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