Fabrication of Microhater by Selective Laser Sintering of Ruthenium Dioxide Micropowder

Abstract

During the topology creation by the selective laser sintering method experimental samples of microheater based on ruthenium dioxide micro-powder were made. The resulting structures were used as microheaters to measure changes in the thermal conductivity of gases. A power comparison of standard platinum spiral element widely used in catalytic thermal sensors and microheater produced by the new technology showed the advantage of the latter.