Abstract
Microfluidic channels have been created for quartz material using micromechanical manufacturing technologies such as micro laser machining, micro ultrasonic machining, and ultra-precision machining. Ultra-precision machining has been used to manufacture cross-junction channels 14 µm wide and 28 µm deep with a three-dimensional triangle cross-section. Micro laser machining has been used to manufacture U-shaped and [InlineMediaObject not available: see fulltext.]-shaped microfluidic channels. Deep holes and microfluidic channels with a high slenderness ratio (width/depth) can be obtained by using micro ultrasonic machining technology. These three machining techniques are compared with respect to surface profiles and machining quality.
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