Fabrication of microcapillaries in fused silica using axicon focusing of femtosecond laser radiation and chemical etching

Abstract

Fabrication of microcapillaries with a diameter of and a length up to in fused silica by axicon focusing of femtosecond laser radiation and subsequent chemical etching in a hydrofluoric acid solution is demonstrated. The etching rate is . It is shown that the microcapillaries have optical waveguiding properties, which testifies to the optical quality of the walls of obtained structures.