Fabrication of Micro Patterned Substrate by Powder Injection Molding

Abstract

In this study, a micro patterned substrate was manufactured by micro powder injection molding (μPIM). As a mold for forming the micro patterned substrate, a metal mold having a linewidth of 100 um was fabricated by micro photo etching process. The specimen prepared through such a process had a sound shape at a shrinkage rate of 16.7% with respect to the mold. To verify industrial applicability of the micro patterned substrate, a micro-fluidic device was fabricated using a smooth flow of fluid therethrough. These results indicated that the micro powder injection molding is useful for micro-fluidics.