Fabrication of micro nickel/diamond abrasive pellet array lapping tools using a LIGA-like technology

Abstract

A manufacturing process of micro nickel/diamond abrasive pellet array lapping tools using a LIGA-like technology is reported here. The thickness of JSR THB-151N resist coated on an aluminum alloy substrate for micro lithography can reach up to 110 µm. During the lithography, different geometrical photomasks were used to create specific design patterns of the resist mold on the substrate. Micro roots, made by electrolytic machining on the substrate with guidance of the resist mold, can improve the adhesion of micro nickel abrasive pellets electroplated on the substrate. During the composite electroforming, the desired hardness of the nickel matrix inside the micro diamond abrasive pellets can be obtained by the addition of leveling and stress reducing agents. At moderate blade agitation and ultrasonic oscillation, higher concentration and more uniform dispersion of diamond powders deposited in the nickel matrix can be achieved. With these optimal experiment conditions of this fabrication process, the production of micro nickel/diamond abrasive pellet array lapping tools is demonstrated.