Fabrication of Micro/Nano Structures on Metals by Femtosecond Laser Micromachining

Abstract

Femtosecond laser micromachining has emerged in recent years as a new technique for micro/nano structure fabrication because of its applicability to virtually all kinds of materials in an easy one-step process that is scalable. In the past, much research on femtosecond laser micromachining was carried out to understand the complex ablation mechanism, whereas recent works are mostly concerned with the fabrication of surface structures because of their numerous possible applications. The state-of-the-art knowledge on the fabrication of these structures on metals with direct femtosecond laser micromachining is reviewed in this article. The effect of various parameters, such as fluence, number of pulses, laser beam polarization, wavelength, incident angle, scan velocity, number of scans, and environment, on the formation of different structures is discussed in detail wherever possible. Furthermore, a guideline for surface structures optimization is provided. The authors’ experimental work on laser-inscribed regular pattern fabrication is presented to give a complete picture of micromachining processes. Finally, possible applications of laser-machined surface structures in different fields are briefly reviewed.