Abstract
Fabrication of microlenses on a diamond surface is an important way to enhance the performance of the embedded nitrogen vacancy (NV) center which is a promising single light source for quantum communication and quantum-based detection. In this work, lenses with a micrometer diameter were fabricated on a diamond surface by using the inductively coupled plasma (ICP) etching technique with a mask of polystyrene (PS) balls. First, 1 µm diameter PS balls were dispersed on the surface of deionized water. Then, the balls were transferred onto a diamond surface. Third, the sample was treated using the ICP technique to form microlenses. By increasing ICP etching time, the surface of fabricated microlenses became smoother. The simulation results demonstrate that the microlenses can greatly improve the photon collection efficiency of the embedded NV center and focus more excitation light to the NV center than bulk diamond.
Highlights
Fabrication of microstructures on a diamond surface is a widely used method that improves the performance of diamond optical devices4 and nitrogen vacancy (NV) center related devices,16–18 such as microlenses on a diamond surface
It was found that polystyrene (PS) balls can be coated on the material’s surface in flexible ways and a variety of scitation.org/journal/adv patterns;21–24 in addition, a microlens array fabricated by the sustenance of PS balls has been used to increase the efficiency of organic light-emitting devices (OLED)
FIG. 3. [(a) and (b)] scanning electron microscope (SEM) images of sample A which was etched for 5 min, (b) magnification of (a), [(c) and (d)] SEM images of sample B which was etched for 10 min, and (d) magnification of (c)
Summary
Diamond is an excellent material for photonic and highpower electronic devices because of its outstanding properties, such as wide bandgap (5.5 eV), high critical breakdown field (>10 MV cm−1), high thermal conductivity (22W cm−1 K−1), high carrier mobility (∼3800 cm V−1 s−1 for holes and ∼4500 cm V−1 s−1 for electrons), and high saturation velocity (107 cm s−1). These performances make diamond a promising candidate for ultraviolet detection. In addition, the nitrogen vacancy (NV) center in diamonds has appeared as a promising quantum light source due to its outstanding properties, such as optical spin-polarization and readout of the ground state spin, long coherent time of the ground state spin at room temperature, and flexibility in its device fabrication. the NV center has attracted significant interest and has been employed in several applications, for instance, in quantum computers, secure communication, and high resolution and highly sensitive detectors. Recently, fabrication of microstructures on a diamond surface is a widely used method that improves the performance of diamond optical devices and NV center related devices, such as microlenses on a diamond surface. Diamond is an excellent material for photonic and highpower electronic devices because of its outstanding properties, such as wide bandgap (5.5 eV), high critical breakdown field (>10 MV cm−1), high thermal conductivity (22W cm−1 K−1), high carrier mobility (∼3800 cm V−1 s−1 for holes and ∼4500 cm V−1 s−1 for electrons), and high saturation velocity (107 cm s−1).. Diamond is an excellent material for photonic and highpower electronic devices because of its outstanding properties, such as wide bandgap (5.5 eV), high critical breakdown field (>10 MV cm−1), high thermal conductivity (22W cm−1 K−1), high carrier mobility (∼3800 cm V−1 s−1 for holes and ∼4500 cm V−1 s−1 for electrons), and high saturation velocity (107 cm s−1).1,2 These performances make diamond a promising candidate for ultraviolet detection.. PS balls with a diameter of 1 μm have been employed as the ICP mask to fabricate microlenses
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