Abstract
Micro Lens arraysLens array are widely used in optical devices such as photo-sensors, digital projectors, photovoltaic cells, 3D imaging etc. These have traditionally been fabricated by photolithography, moulding and embossing, reactive ion etching and electroforming. These processes are wet processes and require expensive setup and running cost. A novel method is presented in this work that allows fabrication of micro lens array using excimer laserExcimer laser micromachining. The fabrication has been done using mask projection with work piece scanning. A KrF excimer laser has been used to micro machine lenses on a poly (methyl methacrylate) substrate. The surface profile of the lens arrayLens array is measured and then related to the laser-material coupling and the energy of the laser pulses. Using this method, it is possible to fabricate micro lenses down to a diameter of 5 µm over a considerably large area.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
