Abstract
Novel fabrication methods of micro-coils were developed. Copper pipes with a diameter of less than 100 μm covered with resist films were exposed to a blue laser beam spot. The pipes were rotated and moved axially for exposing them spirally, and resist patterns were formed on pipe surfaces by dipping the pipes in developer. When copper pipes masked by the spiral resist patterns were etched in ferric chloride solution, fine micro-coils were obtained successfully.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
