Abstract
The single sheet arrays of Au nanoparticles (NPs) embedded into the ZrO2(Y), HfO2(Y), and GeOx (x≈2) films have been fabricated by the alternating deposition of the nanometer-thick dielectric and metal films using Magnetron Sputtering followed by annealing. The structure and optical properties of the NP arrays have been studied, subject to the fabrication technology parameters. The possibility of fabricating dense single sheet Au NP arrays in the matrices listed above with controlled NP sizes (within 1 to 3 nm) and surface density has been demonstrated. A red shift of the plasmonic optical absorption peak in the optical transmission spectra of the nanocomposite films (in the wavelength band of 500 to 650 nm) has been observed. The effect was attributed to the excitation of the collective surface plasmon-polaritons in the dense Au NP arrays. The nanocomposite films fabricated in the present study can find various applications in nanoelectronics (e.g., single electronics, nonvolatile memory devices), integrated optics, and plasmonics.
Highlights
In recent years, the investigations of the optical and electronic properties of the metal nanoparticles (MNPs) embedded into various dielectric matrices have attracted much attention [1]
The investigations of the optical and electronic properties of the metal nanoparticles (MNPs) embedded into various dielectric matrices have attracted much attention [1]. These nanocomposite materials are promising for the applications in nonvolatile memory [2,3,4,5], single electronics [6], integrated optics [7], plasmonics [8], and so forth
The C-V measurements performed on the n-Si(001)/ZrO2(Y)/Au metal-oxide-semiconductor (MOS) stacks with the 40 nm thick ZrO2(Y) layers deposited by RF Magnetron Sputtering in the same conditions as the ones studied in the present paper have revealed a built-in negative charge with the effective surface density ∼ 1012 cm–2 [21]
Summary
The investigations of the optical and electronic properties of the metal nanoparticles (MNPs) embedded into various dielectric matrices have attracted much attention [1] These nanocomposite materials are promising for the applications in nonvolatile memory [2,3,4,5], single electronics [6], integrated optics [7], plasmonics [8], and so forth. A new direction in the studies of the dielectric films with embedded MNPs has emerged, namely, the investigations of the photoconductivity in the MNP arrays in the dielectric films due to the optically excited plasmon resonance (PR) in the MNP arrays The motivation for this activity was to control the conductivity of the nanocomposite materials by means of the optical pumping in the visible wavelength band [9]. The metal film material coagulates into the MNPs during annealing forming the single
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