Fabrication of MEMS Electronics Devices Based on Fire-like ZnO Nanosheets By Low-Temperature Hydrothermal Synthesis Technology

Abstract

The high-density novel morphology fire-like Zinc Oxide (ZnO) nanosheets grown on aluminum (Al) substrate. The fire-like ZnO nanosheets based MEMS technology gas sensors using zinc nitrate hexahydrate, and hexamethylenetetramine by using a low-temperature hydrothermal method. The structure and optical characteristics of fire-like ZnO nanosheets were measured by field emission scanning electron microscopy (FE-SEM) and X-ray diffraction (XRD). The FE-SEM images show that the new morphology was fabricated and high of the ZnO nanosheets can be controlled by the different thickness of Al substrates, it was found that measured high of the ZnO nanosheets increased from 733.3 nm to 2000 nm and the response of ethanol was increased due to the high surface area nanosheets. Keywords: Al thin films, hydrothermal, ZnO nanosheets Figure 1