Abstract

For designing and fabricating magnetic microactuators, both soft and hard magnetic materials may be required. For soft magnetic materials, a high saturation flux density Bs and a great relative permeability µr is desirable; for forming efficient permanent magnets, hard magnetic materials require a high maximal energy product |BH|max. In the area of soft magnetic materials, investigations on NiFe81/19, NiFe45/55, and CoFe were carried out, while an example for a hard magnetic material providing a high energy product is SmCo. Since patterned thin-film magnets feature inferior magnetic properties compared to bulk magnets, a method of determining their magnetic properties was developed.

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