Abstract
Long and smooth tungsten probe is useful for nano-manipulation. In this paper, an ameliorated straightforward dynamic electrochemical etching method and process for long and smooth tungsten probe fabrication have been developed. The relationships between the apex diameter and the aspect ratio of the probe and the fabrication process parameters have been systematically investigated. It’s noticed that by process parameter control, the apex size and the shape of the ultra-sharp probe are controllable and reproducible, and the diameter of the probe can be consistently less than 200 nm while its aspect ratio larger than 8 with the same gradient. To get high efficient yield, the consuming time is also researched. Through practical testing and applications as end-effectors in nano-manipulation, the usability and good quality of the fabricated probes have been verified because of their easy availability, high hardness and wear resistance. DOI: http://dx.doi.org/10.5755/j01.eee.21.4.12775
Highlights
With the development of nanotechnology, nanoscale probes have been widely needed as the end-effectors [1]–[3] to manipulate nano-objects and nano-structures for their mechanical [4]–[7] and electrical characteristic [8]–[11] testing, and for nano-assembling [12]–[15]
Tungsten probes are another alternative to atom force microscope (AFM) probes, whose tips can be less than 20 nm in diameter [18], [19]
With other process parameters like etching voltage, threshold voltage, picking-up speed and immersion depth constant, the KOH concentration were set at different levels in the range of 1 3.5 mol/L, and series of probe fabrication experiments were conducted
Summary
With the development of nanotechnology, nanoscale probes have been widely needed as the end-effectors [1]–[3] to manipulate nano-objects and nano-structures for their mechanical [4]–[7] and electrical characteristic [8]–[11] testing, and for nano-assembling [12]–[15]. AFM probes are easy to be broken due to their large Young’s modulus and their shape is uniform, which restrains their scope of application Tungsten probes are another alternative to AFM probes, whose tips can be less than 20 nm in diameter [18], [19]. Through practical testing and applications as end-effectors in nano-manipulation of the nanowires with 200 nm diameters and tens of microns in length, the usability and good quality of the fabricated probes have been verified because of their high reproducibility, hardness and high tolerance to wear. These probes could be widely used for nano-manipulation in nanotechnology
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