Fabrication of Li 2O–B 2O 3–P 2O 5 solid electrolyte by aerosol flame deposition for thin film batteries

Abstract

Amorphous Li 2O–B 2O 3–P 2O 5 thin films were prepared from an aqueous precursor solution of a LiNO 3 and BCl 3, POCl 3 by Aerosol Flame Deposition. The aqueous precursor solution of the LiNO 3 was first atomized with an ultrasonic vibrator (1.7 MHz), and B 2O 3 and P 2O 5 were synthesized from BCl 3 and POCl 3 by an oxygen–hydrogen flame. Their microstructure and electrical properties were investigated by SEM, XRD, Raman spectroscopy and impedance spectroscopy. XRD analysis revealed that a crystalline phase of LiCl was formed in the glass soot as well as amorphous boron and phosphorus oxides, and the crystalline LiCl found in deposited glass soot completely disappeared by heat treatment. The correlation between the structural modification of glass network, compositional variation and the conductivity was characterized by Raman spectroscopy. The glass electrolyte fabricated in this study exhibited a maximum conductivity of about 10 − 7 S/cm at 30 sccm flow rate of BCl 3 and POCl 3.