Abstract
In this study, a finely patterned lead zirconate titanate (PZT) film is fabricated by a combination of inkjet printing (IJP), chemical solution deposition (CSD), and surface energy controlling technology. We used patterned multilayer lower electrodes, which easily enable high surface energy contrast on the lower electrode area and achieved high accuracy patterning in the inkjet deposition process. The PZT film, which can be used as an actuator, has 2 µm thickness after iterating the set of surface treatment, inkjet deposition, and baking. This film has a dielectric constant (εr) of 1700, loss tangent (tan δ) of 0.05, remanent polarization (Pr) of 10 µC/cm2, and coercive field (Ec) of 23 kV/cm. Piezoelectric coefficient d31 estimated from a displacement of the membrane was determined to be 77 pm/V. These results suggest that this method is a candidate for piezo microelectromechanical system (MEMS) fabrication.
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