Abstract
A Grating-Interferometer setup is shown to be ideally suited for the fabrication of high quality periodic structures over large sample areas via laser ablation. Virtually perfect line structures with periods in the submicron range are easily obtained. The capabilities and limitations of the new setup are analyzed theoretically for nanosecond and femtosecond laser sources with different coherence properties. The theoretical predictions are verified experimentally for various sample materials.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
