Abstract
In order to deposit high quality high temperature superconducting (HTS) YBCO thin films with a large area, the pulsed laser scanning (PLS) method was tried and the thickness distribution of the film was investigated. Large area YBa/sub 2/Cu/sub 3/O/sub 7-x/ thin films on /spl phi/ 36 mm diameter LaAlO/sub 3/ and /spl phi/ 42 mm diameter Y-ZrO/sub 2/ (YSZ) single crystal substrates were obtained by rotating lenses with radii of 9 and 12.9 mm. The critical temperatures T/sub c/ of the films at the center and edge were all 90 K. The critical current density J/sub c/ at 77 K and zero magnetic field is over 10/sup 6/ A/cm/sup 2/. X-ray diffraction showed that the thin films are completely c-axis oriented. The V-I characteristics of the thin films were also investigated.
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